Incheon Forum: Reviving the Local Economy

▲The 2nd public forum of the Inha–Incheon Future Design Forum was held at Room 112 of the 60th Anniversary Hall (INHA Creative Space) on the March 11th.

Inha university successfully concluded the 2nd public forum of the Inha–Incheon Future Design Forum, which seeks sustainable future strategies for Incheon.

At this second forum, under the theme ‘How to Overcome the Crisis of the Local economy,’ participants diagnosed key issues in Incheon’s local economy—such as the crisis facing local self-employed businesses and small merchants, shrinking consumption, and financial debt—and explored practical policy alternatives.

Professor Kang Byeong-gu of the Department of Economics served as the moderator, and both field perspectives and academic solutions were discussed in depth.

Professor Han Jae-jun of the Department of Finance and Management participated as a presenter, analyzing the decline in regional consumption and the deterioration of the business environment for the self-employed amid high interest rates and high inflation, and proposed the need for region-tailored financial support and structural transition policies.

Lee Seong-won, Secretary General of the Korea Federation of Micro Enterprises and Self-Employed, highlighted structural difficulties—such as the debt burden of small business owners and issues related to rent and platform fees—based on field cases, and proposed measures for institutional improvement and strengthening the social safety net.

Following this, Park Jeong-man, former Director of the Seoul Financial Welfare Counseling Center; Kim Ha-un, Chairman of the NGO Together Incheon People; Byeon Dong-hun, CEO of Kona I; and Oh Seung-seop, Chairman of the Incheon Association of Small Manufacturers, participated in the discussion, presenting various alternatives including the role of local currency policies, financial welfare support systems, strengthening the competitiveness of small manufacturers, and building public-private cooperation models.

Participants agreed that the crisis of the local economy should be approached not only as a short-term economic response but as a comprehensive strategy linking industrial, financial, and welfare policies. In particular, they emphasized that local governments should organically design policies such as local currency, public procurement, and revitalization of neighborhood commercial districts so that they lead to a recovery in the perceived economic situation.

The 3rd Policy Public Forum, which will continue on the 18th, will be held under the theme ‘Sustainable Doughnut City Model and Policy Tasks for Incheon.’

Professor Kim Chang-gyun of the Department of Environmental Engineering will serve as moderator, and Professor Woo Seung-beom of the Department of Oceanography and Kim Byeong-kwon, Director of the Green Transition Institute, will present.

The presentations will examine environmental, marine, and energy policy tasks for Incheon from the perspective of ‘Doughnut Economics,’ which considers both the ecological limits of cities and their social foundations in the era of climate crisis.

Former Director Cho Gyeong-du of the Incheon Carbon Neutrality Research Support Center; Professor Lee Jun-beom of the Law School; Kim Chung-gi, Representative of the Incheon Urban Agriculture Network; and Jang Si-jeong, Steering Committee Member of the Incheon Citizen Power Cooperative Network, will participate in the discussion, addressing issues such as carbon neutrality, urban agriculture, citizen-participatory energy transition, and institutional foundations.

An official from the Regional Cooperation Center stated, “The second forum reaffirmed that the recovery of the local economy is the most urgent task for the local community,” adding, “In the upcoming third forum, we hope to gather wisdom together with citizens on a sustainable model for Incheon that can simultaneously address the climate crisis and inequality.”

지난 11일 60주년 기념관 112호(INHA Creative Space)에서 열린 인하인천미래디자인포럼 2회 공론장에서 참석자들이 기념사진을 촬영하고 있다.

▲Participants are taking a commemorative photo at the 2nd public forum of the Inha–Incheon Future Design Forum held on the 11th at Room 112 of the 60th Anniversary Hall (INHA Creative Space).

Original Article

Inha Med: Bridging Regional Healthcare

The College of Medicine at Inha University is accelerating ‘Community-Based Medical Education,’ which expands the educational scope beyond the confines of classrooms and university hospitals into the community.

The College of Medicine is conducting specialized training for 3-week clinical clerkships this month and in coming June at a hospital ship (Geongang Ongjin-ho) and Baekryeong Hospital for 4th-year medical students.

From March 4 to 6, students boarded the Ongjin-gun hospital ship to conduct their first clinical clerkship under the guidance of public health doctors and personnel, and a second clinical clerkship is also scheduled for June. Additionally, they are conducting a clinical clerkship at Baekryeong Hospital on Baekryeong Island for nine days from March 9 to 17.

Students will experience the specificity and importance of public healthcare through regional status lectures and seminars, participation in island tour medical treatments, and involvement in Doctor-Heli patient evacuations.

The College of Medicine has been preparing community-based medical education since 2022 to cultivate medical personnel suited for the local community. Since last year, as the Ministry of Education implemented the ‘Regional Innovation Strategy and Education (RISE)’ project, which considers the regional characteristics and strengths/specializations of local universities in 17 cities and provinces nationwide, this program was adopted as specialized education, leading the innovation of medical education.

To this end, the College of Medicine signed agreements with Ongjin-gun, Baekryeong Hospital, and Incheon Medical Center, and plans to sign agreements with a total of 100 community public and private medical institutions within the year.

Seo Han Yong, a 4th-year medical student who participated in the Baekryeong Hospital clinical clerkship, said, “It taught me much more than university hospital training and made me properly realize the reality of community patients we must look after,” and added, “It was a precious opportunity to think about what to aim for through the dedication shown by our senior doctors on the island.”

The College of Medicine plans to establish a practical community-centered medical education system. In particular, project-based classes will be conducted to analyze the epidemiology of major diseases among residents of specific regions and propose health policies or health promotion programs suitable for those regions. Furthermore, the college plans to significantly expand education on social responsibility to protect the health of the community by strengthening the ability to analyze and solve regional health problems and learning deeply about the roles and responsibilities of public hospitals.

Inha University Hospital, an affiliated university hospital under the university’s medical center, is also positioning itself as a community-based medical institution that meets the specificities of the Incheon region, which is expected to serve as a turning point for regional medical development as a hospital-academia cooperation model.

Inha University Hospital has continued medical support for island areas for 28 years, starting with Baekryeong Island in 1998. It has evolved from simple medical volunteering in the early days to medical service agreements for Ongjin-gun residents, installation of remote consultation systems, and expansion of prevention-oriented public health, gradually developing into a systematic and effective medical system. Notably, through the ‘1 Island 1 Primary Care Hospital’ project, it has been designated in charge of Daecheong-myeon and Baekryeong-myeon, and has achieved results such as specialists participating in real-time intensive care through the establishment of a smart remote video consultation system with Baekryeong Hospital.

Lee Taek, President of Inha University Medical Center, stated, “We plan to further expand our role as a responsible medical and educational institution so that customized talent can be cultivated through regional specialized education from the educational stage to work for the region.”

▲Director Lee Du Ik of Baekryeong Hospital providing emergency room patient education to 4th-year medical students from Inha University College of Medicine.

▲The Dean of the College of Medicine at Inha University, students, and medical staff of Baekryeong Hospital taking a commemorative photo.

Original Article

Aerogel-Grown Catalyst for CO2 Conversion

(사진 왼쪽부터) 논문 제1저자인 민경훈 화학·화학공학융합학과 석·박사 통합과정 연구원과 지도교수인 심상은 화학공학과 교수.

▲ (From left) Min Kyung-Hoon, first author and integrated master’s/doctoral researcher in the Department of Chemistry and Chemical Engineering, and Professor Shim Sang-Eun(Advisor) of the Department of Chemical Engineering.

Professor Shim Sang-Eun’s research team in the Department of Chemical Engineering recently developed a next-generation catalyst technology capable of capturing carbon dioxide and converting it into useful compounds simultaneously.

 

This technology is a new method of directly growing Metal-Organic Frameworks (MOF) inside silica-based aerogels.

 

Professor Shim’s research team designed the aerogel—which has a lightweight and highly porous structure—to act as a confined reaction space, ensuring the catalytic material forms uniformly inside. Through this, they reduced particle aggregation, a common issue in conventional catalysts, and enabled more effective utilization of the active sites required for the reaction.

 

In particular, they developed a new aerogel support by combining silicon-based polymers with hydrophilic polymers and succeeded in evenly dispersing MOF, which is effective for carbon dioxide adsorption and conversion reactions, inside. This structure possesses both a high surface area and a rigid framework, offering the advantage of maintaining its shape even under demanding synthesis conditions.

 

Additionally, they further enhanced reaction efficiency by introducing an ionic liquid that serves to effectively capture carbon dioxide on the catalyst surface. As a result, it showed excellent carbon dioxide adsorption performance even at room temperature, and in catalytic reaction experiments, achieved near-perfect reaction efficiency with only a very small amount of catalyst.

 

This catalyst showed almost no performance degradation even after more than 10 repeated uses and operated stably even in environments where moisture was present. It is evaluated that the hydrophobic characteristics of the siloxane-based structure increased the possibility of application to actual industrial processes. Min Kyung-Hoon, an integrated master’s/doctoral researcher in the Department of Chemistry and Chemical Engineering Fusion, participated as the first author of this study.

 

Professor Shim Sang-Eun said, “By employing a strategy of growing the catalyst directly inside the aerogel, we effectively overcame the limitations of existing metal-organic framework catalysts,” adding, “This technology will serve as a practical alternative that contributes to reducing carbon dioxide and utilizing it as a resource.”

▲Schematic diagram of the research on improving carbon dioxide conversion performance through catalyst growth inside aerogel.

Original Article

Meanwhile, the results of this study were published in the international academic journal Advanced Composites and Hybrid Materials (Impact factor: 21.8).

Alumni Boost $1 Breakfast with Rice Donation

▲President Cho Myung-woo and Alumni Association President Kim Jong-woo participate in the “1,000-Won Breakfast” meal service volunteer activity to celebrate the new semester.

Inha University recently held a “1,000-Won Breakfast” volunteer meal service in collaboration with the Inha University Alumni Association to welcome the new semester.

The event was organized following the inauguration of Alumni Association President Kim Jong-woo in January, who donated 25 sacks of rice (10kg each), totaling 250kg, to commemorate his appointment.

University officials, including President Cho Myung-woo, and Alumni Association representatives, including President Kim, attended the event and personally served breakfast to students, delivering messages of encouragement for the new semester.

The “1,000-Won Breakfast” program provides university students with breakfast meals at a cost of 1,000 won. For each meal, the university receives a total of 3,000 won in support from the government and Incheon Metropolitan City, supplemented by university funding to offer the service. In response to strong student demand this year, the number of meals provided daily has been increased from 100 to 130 students. The Alumni Association has continued its annual tradition of donating rice to support junior students.

Kim Jong-woo, President of the Alumni Association, said, “Upon assuming the role of Alumni Association President, I wanted to practice meaningful sharing with my alma mater and junior students,” adding, “The Alumni Association will continue to provide steady support to serve as a reliable support system for our junior students.”

President Cho Myung-woo remarked, “The warm interest and support from the Alumni Association are a great source of strength for our students,” adding, “The university will also expand various welfare programs so that students can focus on their studies as they begin the new semester.”

조명우 총장과 김종우 총동창회장이 새 학기를 맞이해 ‘천원의 아침밥’ 배식 봉사를 마치고 학생들과 식사를 하고 있다.▲President Cho Myung-woo and Alumni Association President Kim Jong-woo share a meal with students after completing the “1,000-Won Breakfast” volunteer service.

Original Article

MOU Signed for AI Security Training

Inha University recently signed a Memorandum of Understanding (MOU) with IGLOO Corporation, an AI-based security solutions company, to cultivate specialized talent in AI-based security and enhance industry–academia cooperation.

Under this agreement, Inha University and IGLOO Corporation will collaborate on ▲ developing customized curricula and educational content to nurture outstanding AI talent ▲ jointly identifying and conducting industry–academia R&D projects in the field of AI-based security ▲ strengthening students’ practical competencies through company-linked internship programs ▲ discovering outstanding talent in AI-based security and supporting their employment pathways.

Inha University expects this MOU to serve as a meaningful opportunity to foster specialized professionals through educational and research collaboration in the AI-based security field, while further reinforcing the foundation for industry-linked education and research cooperation.

Kim Eun-jung, Vice President of IGLOO Corporation, stated, “As AI technologies continue to advance, cultivating specialized talent in the security sector is becoming increasingly important. Through this agreement, we will establish a comprehensive talent development system that integrates academia, practice, and research, and continue to support the discovery and growth of professionals who will lead the AI-based security industry.”

Baek Sung-hyun, Vice President for Academic Affairs, said, “We will build a cooperative model in which industry, education, and research are organically connected in the field of AI-based security. Through close industry–academia collaboration, we will actively support our students in developing into AI security professionals equipped with strong, field-oriented practical capabilities.”

▲ Officials from the University and IGLOO Corporation pose for a commemorative photo at the MOU signing ceremony for fostering AI-based security talent and strengthening industry–academia cooperation.

Original Article Link

Inha Univ. Team Earns IEEE IV 2026 Recognition

머신러닝 모델과 컴퓨터 비전이라는 두 가지 입력 데이터가 베이지안 필터를 통해 융합되는 전체적인 처리 흐름 모식도.

▲Schematic diagram illustrating the overall processing flow in which two input data sources—machine learning models and computer vision—are fused through a Bayesian filter.

Graduate students Lee Dong-min and Lee Seung-yong, master’s candidates in the Department of Mechanical Engineering at Inha University, have received international recognition for their research on improving road surface condition classification performance for autonomous vehicles.

Through their paper titled “Multimodal Bayesian Filtering for Enhanced Road Surface Condition Classification in Intelligent Vehicles Safety Systems,” the researchers proposed a novel algorithm for road surface condition classification.

The core contribution of the study lies in significantly improving classification accuracy by fusing data-driven machine learning models with computer vision–based road surface classification results using a real-time Bayesian filtering approach.

This research has been accepted for publication at the IEEE Intelligent Vehicles Symposium (IV) 2026 International Conference, scheduled to be held this June in Detroit, USA. IEEE IV is one of the most prestigious international conferences in the fields of autonomous driving and intelligent vehicles, known for its rigorous review process and strong emphasis on academic originality and impact.

Professor Kiwoo Kim of the Department of Mechanical Engineering at Inha University commented, “I hope this achievement serves as an opportunity for master’s students in mechanical engineering to gain confidence that they, too, can present research at leading conferences in the electrical and electronics engineering field, and that it will support their future career development.”

Meanwhile, this research was conducted with support from a national R&D project funded by the Ministry of Trade, Industry and Energy, titled “Development of an Embedded AI Controller for Road Surface Condition Recognition” (lead company: HL Mando), under the supervision of Professor Kiwoo Kim as principal investigator. Follow-up studies are planned.

Original Article

Inha 2026-1 Commencement Ceremony Held

▲ President Cho Myung-woo delivers a congratulatory address at the February 2026 Commencement Ceremony held on the 20th in the Main Auditorium of the University’s main building.

Inha University held its February 2026 Commencement Ceremony on the 20th in the Main Auditorium of the University’s main building.

A total of 3,601 students received degrees at the ceremony, including 2,551 undergraduates, 910 master’s students, and 140 doctoral candidates.

The ceremony was attended by President Cho Myung-woo, Kim Yoon-hwi, Executive Director of the Board of Trustees of Jeongsuk Inha School Foundation, Kim Jong-woo, President of the Inha University Alumni Association, as well as graduates’ families and friends.

Dr. Seo Dong-woo from the Department of Mechanical Engineering and Dr. Maung Nyunt from the Smart Governance Policy program received the President’s Award. Lee Jung-hyun, a student from the Department of Social Welfare, received the Alumni Association President’s Award.

Lee Si-eun, a representative graduate from the Department of International Trade, said, “At Inha, I learned how to take on challenges and endure failure, and above all, I learned to believe in myself. I will strive to make the name ‘Inha’ a source of pride by following in the footsteps of the many alumni who are shining in their respective fields.”

Kim Yoon-hwi, Executive Director of the Board of Trustees of Jeongsuk Inha School Foundation, remarked, “I hope you become confident Inha graduates who value direction over speed and choose values over mere achievements. I wholeheartedly support your bold first steps as you stand on the runway of a new chapter in life.”

In his congratulatory address, President Cho Myung-woo stated, “As you begin your flight into society, you may at times need to adjust your speed and reset your direction under ever-changing skies. However, the time you spent at Inha and the moments when you refused to give up will illuminate your path once again. No matter which sky you fly in or which path you choose, Inha will always be the place of your first takeoff and a warm airport you can return to whenever you need to pause and catch your breath.”

▲ The February 2026 Commencement Ceremony is being held in the Main Auditorium on the 20th.

▲ Kim Yoon-hwi, Executive Director of the Board of Trustees of Jeongsuk Inha School Foundation, delivers a congratulatory address at the ceremony.

▲ Kim Jong-woo, President of the Inha University Alumni Association, delivers a congratulatory address at the ceremony.

▲ Graduates pose for commemorative photos to celebrate their graduation.

Original Article

Inha’s 3-Year Top 4 Employment Excellence

According to the 2025 Higher Education Public Disclosure released through the Korean Higher Education Disclosure System (Academy Info), Inha University once again recorded a strong employment rate, ranking fourth nationwide among universities producing more than 3,000 graduates.

With an employment rate of 68.5%, Inha University placed fourth, following Sungkyunkwan University (71.3%), Korea University (69.9%), and Hanyang University (68.9%). By maintaining fourth place for three consecutive years, Inha university has established a consistent top-tier ranking in employment outcomes among major universities with over 3,000 graduates.

The result reflects the effectiveness of the university’s employment support system despite a contracting recruitment market and the growing trend of rolling and career-based hiring.

Inha University also performed well not only in employment quantity but also in employment quality. In the job retention rate—an indicator measuring whether graduates remain employed at the same workplace after a certain period—the university recorded 86.4%, an increase of 0.9 percentage points from last year’s 85.5%, maintaining a high level among universities with over 3,000 graduates.

The consistent quantitative and qualitative employment success of students is attributed to the university’s wide range of employment support programs, including job- and industry-tailored initiatives.

Inha university actively provides both direct and indirect employment support through the operation of the University Job Plus Center, Field Training Support Center, and IPP Dual Training Center, expanding practical training opportunities and offering employment counseling.

The University Job Plus Center offers one-on-one customized career strategy consultations, job information, and a variety of career and employment support programs. Key programs include the small-group, intensive employment consulting program “Inha First Class,” job-specific lectures by industry professionals, and Visiting Employment Study Groups.

Graduates who previously participated in these programs later return as mentors through initiatives such as Job Fairs and Online Mentoring, establishing a virtuous cycle of employment support. Through this network, alumni share real-world work experience and industry insights with current students, supporting their successful transition into the workforce.

Inha university also operates a standardized field internship semester system (Co-op) in collaboration with companies across diverse industries, enabling students to gain hands-on experience aligned with their majors and interests. This system allows students to earn academic credits while acquiring practical field experience. In the 2025 academic year, 1,085 students are participating in the program across 389 organizations, with participation steadily increasing each year.

The Industry-Professional Practice Program (IPP) provides systematic theoretical education and on-site training in partnership with companies, cultivating practice-oriented, customized talent. The program has received positive feedback from both students and companies due to its high rate of conversion to full-time employment. Based on these achievements, Inha University was selected this year as a pilot institution for the “IPP Specialized University” initiative. Moving forward, the university plans to secure greater operational autonomy, enhance program quality, and further strengthen cooperation with major and leading enterprises.

President Cho Myung-woo commented, “This result, achieved amid a challenging employment environment, is not a short-term outcome but the product of a comprehensive, full-cycle employment support system spanning from the first to the fourth year. We will continue to develop and operate diverse programs to support students’ career development and employment.”

2025 취업캠프 인하 퍼스트클래스에서 교육을 듣는 학생들.

▲ Students participating in training at the “Inha First Class” Employment Camp 2025.

Original Article

Inha Wins Foreign Minister’s Commendation

Inha University recently received a Foreign Minister’s Commendation in recognition of its contributions to fostering global talent and enhancing the national image of the Republic of Korea.

The university was highly evaluated for promoting Korea’s outstanding educational capabilities worldwide, enhancing the national brand value, and successfully fulfilling the role of public diplomacy through tangible achievements in education diplomacy.

In particular, the educational cooperation project jointly conducted with Baku Engineering University (BEU) in Azerbaijan since 2020 has made a significant contribution to the field of education diplomacy.

Inha University operates a “3+1 International Dual Degree Program” designed in collaboration with BEU. Under this program, students complete three years of study at BEU, followed by one year of study in Korea, upon which they receive dual degrees. As students spend one academic year studying at Inha University, a minimum Korean language proficiency requirement is also set, contributing to the spread of the Korean language.

The program is offered across four majors—Civil Engineering, Electronic Engineering, Electrical Engineering, and Information Technology (IT)—and produced its first graduating class in 2024, marking the full-scale advancement of higher education cooperation between Korea and Azerbaijan.

In addition, the university is successfully operating joint and dual degree programs as well as King Sejong Institute programs in collaboration with partner universities in countries such as Uzbekistan and China, leading the overseas expansion of Korean higher education.

Inha University is also successfully operating Inha University in Tashkent (IUT) in Uzbekistan, which has drawn attention as Korea’s first case of exporting a university-level education system since its establishment in 2014. Last year, the university received final approval from China’s Ministry of Education to establish a Sino-foreign cooperative educational institution with Henan University of Technology leading to the launch of the Inha Institute of Technology, Henan University of Technology, which operates under a 4+0 dual degree system.

Moving forward, Inha University plans to continue expanding education diplomacy cooperation by implementing joint degree programs, educational curricula, and international training initiatives in regions such as Central Asia and the Caucasus.

President Myoung-Woo Cho stated, “The dual degree program with BEU in Azerbaijan has established itself as a highly regarded educational program in the local community through annual consulting on laboratory and practical training system development, as well as customized and intensive management, thereby opening new horizons in education diplomacy.” He added, “Building on this commendation, we will further expand and advance education diplomacy aligned with national foreign policy and strive to solidify our position as a leading internationalized university.”

▲ President Myoung-Woo Cho (right) and Tae-Jun Jeon, Head of the Office of International Affairs, pose for a commemorative photo after receiving the Foreign Minister’s Commendation.

Original Article

Strategies for Improving EUV Photoresists

A joint research team led by Dr. Gu Ye-jin of the Natural Circulation Electronic Materials Research Institute at Inha University and the Polymer Engineering and Materials Synthesis Laboratory has recently attracted significant academic attention by consecutively proposing strategies to overcome the reliability issues and performance limitations of photoresist materials used in EUV lithography-based ultra-high-density semiconductor manufacturing processes.

EUV lithography is a technology that uses extremely short-wavelength light to draw ultra-fine semiconductor circuits at the nanometer scale. The material that actually forms the shapes of transistors and metal interconnects within integrated circuits is the photoresist, which undergoes chemical changes upon exposure to light to create the circuit pattern. As such, photoresists are considered a core patterning material essential for accurately fabricating semiconductor circuits.

Recently, tin nanocluster-based photoresists, which enable more precise circuit patterning than conventional organic photoresists, have emerged as promising next-generation materials. However, these materials suffer from limitations in that their properties change upon exposure to air during processing, leading to degraded pattern quality and reduced process stability.

Dr. Gu Ye-jin focused on the fact that this instability originates from a specific chemical property of tin—Lewis acidity. Because tin readily reacts with moisture in the air, she proposed a strategy to mitigate this issue by incorporating fluorine atoms. Through material synthesis and lithography experiments, she demonstrated that this approach significantly enhances the stability and process reliability of photoresists.

The fluorine-incorporated tin oxide photoresist synthesized by the joint research team exhibited excellent process stability, showing outstanding patterning resolution at the 10-nanometer (nm) scale without reliability degradation caused by atmospheric exposure. Furthermore, by leveraging the material properties enabled by fluorine incorporation, the team implemented a bilayer photoresist structure. As a result, circuits could be formed using lower EUV exposure doses, significantly improving overall process efficiency.

This research was conducted in collaboration with the Samsung Electronics Semiconductor Research Center under the support of the Samsung Future Technology Incubation Center. The results were recently published in Advanced Functional Materials, a highly influential international journal in materials science, under the title:

Tin-Oxo Nanocluster Extreme UV Photoresists Equipped with Chemical Features for Atmospheric Stability and High EUV Sensitivity.”

In addition to this work, Dr. Gu also conducted research on chemically amplified resists (CARs), proposing a new approach to improve the productivity of EUV lithography processes. EUV lithography operates using light with a wavelength of 13.5 nm, and insufficient photon delivery during exposure can lead to degraded pattern quality.

Rather than increasing the exposure dose, Dr. Gu proposed incorporating high light-absorption elements into the photoresist. This strategy reduces photon loss during exposure, thereby enhancing pattern quality while maintaining process efficiency.

Experimental results confirmed that iodine is an effective element for improving the operational efficiency of chemically amplified photoresists. Based on these findings, the team synthesized a CT contrast agent–based radiation sensitizer containing a high concentration of iodine and applied it to commercial EUV photoresists. This approach successfully demonstrated simultaneous improvements in EUV sensitivity and pattern quality.

This research was carried out in collaboration with the Electronic Materials Division of Dongjin Semichem and was recently published in ACS Applied Materials & Interfaces under the title: “Positive Role of Iodine Atoms in Chemically Amplified Photoresists for Extreme Ultraviolet Lithography.”

Dr. Gu Ye-jin of the Natural Circulation Electronic Materials Research Institute at Inha University stated, “It was meaningful to propose solutions to advanced semiconductor technology challenges through close collaboration with industry. I will continue pursuing research that contributes to strengthening the competitiveness of Korea’s semiconductor technology.”

불소화 리간드를 주석산화물에 도입함으로써 주석과 대기 중 분자 간 반응성이 감소하고, 화학적 직교성 확보에 따라 적층 박막 구조 구현이 가능해져 레지스트 감도가 향상되는 두 가지 핵심 특성.

▲ Two key characteristics: By introducing fluorinated ligands into tin oxide, reactivity between tin and atmospheric molecules is reduced, chemical orthogonality is secured, and multilayer thin-film structures become feasible—resulting in enhanced resist sensitivity.

아이오딘이 화학 증폭형 포토레지스트의 작동 효율을 향상시키는 고흡광 원소임을 확인하고, 이를 다량 포함한 CT 조영제 기반 방사선 증감제를 상용 EUV 포토레지스트에 적용하여 감도와 패턴 품질이 동시에 향상됨을 입증

▲ Iodine was identified as a high-absorption element that improves the efficiency of chemically amplified photoresists. By applying a CT contrast agent–based radiation sensitizer containing a high concentration of iodine to commercial EUV photoresists, simultaneous improvements in sensitivity and pattern quality were demonstrated.

▲Dr. Gu Ye-jin of the Natural Circulation Electronic Materials Research Institute

Original Article